ANALYSIS OF ELECTROMAGNETIC INTERFERENCE EFFECT ON SEMICONDUCTOR SCANNING ELECTRON MICROSCOPE IMAGE DISTORTION

Analysis of Electromagnetic Interference Effect on Semiconductor Scanning Electron Microscope Image Distortion

Most electronic devices are susceptible to electromagnetic interference (EMI); thus, it is necessary to recognize and identify the cause and effect of EMI as it can corrupt electronic signals and degrade 128 equipment performance.Particularly, in semiconductor manufacturing, the equipment used for image capturing is subject to various noises induce

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